Roger Howe is a professor at the University of California at Berkeley. Dr. Howe is an acclaimed MEMS pioneer, and the co-inventor of polysilicon surface micromachining. He is the author of numerous papers on MEMS devices and technologies. Dr. Howe is a Fellow of the IEEE and was awarded a citation "...for seminal contributions to micro-fabrication technologies, devices, and microelectromechanical systems." He is an inventor and the holder of numerous patents related to MEMS devices. |